Detector for large wafer surfaces
US6421414B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 6, 2000 |
| Grant date | Jul 16, 2002 |
| Priority date | — |
| Expiry date | Oct 6, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/076
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to an apparatus for total reflection X-ray fluorescence analysis, which allows a faster and more precise detection of the X-ray fluorescence spectrums of a sample. DRIFT detectors are used in the transducer of the apparatus in which charge carriers created can be accelerated towards a collecting anode of a very small design by a radial component of the electrical field generated by annular electrodes. A faster and more precise measurement of the charge carriers generated in the detector interior is possible due to the low capacitance of the collecting anode. The X-ray fluorescence of a sample can be measured in high-sensitive resolution by an array comprising such DRIFT detectors. The surface concentrations of the different foreign atoms in the sample can be determined in high-sensitivity resolution from the X-ray fluorescence spectrums obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.