Process and arrangement for continuous treatment of objects

US6422798B1 · kind B1 · utility

Assignee

• Angewandte Solarenergie-Ase GmbH · DE

Inventors

• Thomas Lauinger · Niedernberg, DE
• Armin Gerhard Aberle · Sydney, AU
• Richard Auer · Wolfsburg, DE
• Guido Halbach · Hannover, DE
• Manuel Kanne · Hohenhausen, DE
• Hanno Paschke · Hannover, DE
• Jens Moschner · Zeven, DE

Key dates

• Filing date: Feb 22, 2000
• Grant date: Jul 23, 2002
• Expiry date: Feb 22, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6776
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The invention relates to a process for continuous treatment of objects in a processing unit, where the objects are moved along a conveyor track passing through the processing unit by a first linear-action conveyor device performing a back-and-forward movement and where the objects are supplied to/removed from the conveyor track by a transfer device. To permit with measures of simple design a continuous treatment without parasitic depositions or high temperatures impairing the process sequence, it is proposed that the objects be arranged on supports which are lined up on the conveyor track by at least two first linear-action conveying devices performing a back-and-forward movement and are then conveyed continuously through the processing unit, where the lining up and subsequent continuous conveying of the supports is performed such that one of the first conveying devices lines up a support transferred to the conveyor track with those supports already on the conveyor track while the other first conveying device continuously conveys the previously lined-up supports.