Electrostatic apparatus for measurement of microfracture strength
US6424165B1 · kind B1 · utility
12Cited by
11References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 20, 2000 |
| Grant date | Jul 23, 2002 |
| Priority date | — |
| Expiry date | Sep 20, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0286
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A new class of materials testing apparatus has been invented. Particularly suited to the measurement of fracture and fatigue properties in the extremely strong materials encountered in microelectromechanical systems, material strains well in excess of 1% can be applied pseudostatically, dynamically, or repetitively by these testers. There are no other practical methods to determine these material properties routinely in a process environment, and few alternatives in any circumstances.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.