Optical translation measurement
US6424407B1 · kind B1 · utility
124Cited by
39References
66Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2000 |
| Grant date | Jul 23, 2002 |
| Priority date | — |
| Expiry date | Sep 7, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F3/0312
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining the relative motion of a surface with respect to a measurement device comprising: illuminating the surface with incident illumination; detecting illumination reflected from the surface to form at least one detected signal; and determining the amount of relative motion parallel to the surface from said at least one detected signal, characterized in that said determining includes correcting for the effects of relative motion perpendicular to the surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.