Capacitive sensor

US6425289B1 · kind B1 · utility

Assignee

• Micronas GmbH · DE

Inventors

• Guenter Igel · Teningen, DE
• Ulrich Sieben · Meßkirch, DE
• Juergen Giehl · Kirchzarten, DE

Key dates

• Filing date: Apr 16, 1999
• Grant date: Jul 30, 2002
• Expiry date: Apr 16, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0075
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A capacitive sensor is described which includes a first electrode remote from a second electrode, wherein the first electrode and the second electrode form a measurement capacitance. The first electrode is arranged on a first substrate member and the second electrode is arranged on a second substrate member. At least one of the electrodes has a spatially resolved structure which allows a spatially resolved measurement of the capacitance. The spatial structure of the electrode may be implemented in form of several mutually parallel stripe-shaped elements or in form of a plurality of spaced-apart elements that are arranged in a two-dimensional pattern. Associated with the electrodes are electronic processing units integrated in the substrate members.