Oil-less differential pressure sensor
US6425290B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 9, 2001 |
| Grant date | Jul 30, 2002 |
| Priority date | — |
| Expiry date | Feb 9, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L13/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor is provided for measuring a pressure difference between two fluids which does not require isolation fluid. The pressure sensor includes a diaphragm support member having an outer periphery and diaphragms coupled thereto. Movement of the diaphragms are the movement of a moveable member. The movement can be sensed to determine the applied differential pressure. The coupling member is joined to the outer periphery with a web. The web is recessed from opposed outwardly facing surfaces of the outer periphery, and first and second diaphragms disposed on opposite sides of the diaphragm support member. Each diaphragm is joined to the outer periphery and to the coupling member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.