Micromechanical, capacitative ultrasound transducer and method for the manufacture thereof

US6426582B1 · kind B1 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Kurt W. Niederer · Charlotte, US
• Peter-Christian Eccardt · Ottobrunn, DE
• Dieter Maier-Schneider · Borgo San Lazzaro, DE

Key dates

• Filing date: May 18, 2000
• Grant date: Jul 30, 2002
• Expiry date: May 18, 2020

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/053
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A micromechanical, capacitative ultrasound transducer having a planar membrane is adapted such for manufacturing an air gap between membrane and cooperating electrode that the membrane collapses. The width of the air gap is thereby defined by nubs located on the membrane that lie against the cooperating electrode.