Height measuring apparatus
US6428171B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 1999 |
| Grant date | Aug 6, 2002 |
| Priority date | — |
| Expiry date | Jan 4, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/0608
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A height measuring apparatus characterized by having an illumination optical system for illuminating the surface of an object, a pair of imaging optical systems having optical axis arranged symmetrical with respect to the optical axis of all light beam reflected by the object and designed to converging a part of the light beam along the optical axes, a pair of light-detecting optical systems arranged in a converging plane of the imaging optical systems and designed to detect light spots which change in position in accordance with the height of the object, and height calculator for generating spot-position signals from the light-intensity signals supplied from the light-detecting optical systems and calculating the height of the surface of the object from the spot-position signals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.