Scintillator panel, radiation image sensor, and methods of making the same
US6429430B2 · kind B2 · utility
13Cited by
8References
16Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 18, 2000 |
| Grant date | Aug 6, 2002 |
| Priority date | — |
| Expiry date | Feb 5, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01T1/2928
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
A scintillator having a columnar structure adapted to convert incident radiation into visible light is formed on one surface of a substrate made of Al in a scintillator panel. All surfaces of the substrate and scintillator are covered with a first polyparaxylylene film, whereas an SiO2 film is formed on the surface of polyparaxylylene film on the scintillator side. Further, a second polyparaxylylene film is formed on the surface of SiO2 film and the surface of polyparaxylylene film on the substrate side, so that all surfaces are covered with the second polyparaxylylene film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.