Optical position measuring system employing a scale with multiple partial measuring graduations having different graduation periods
US6429940B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 24, 2000 |
| Grant date | Aug 6, 2002 |
| Priority date | — |
| Expiry date | Feb 24, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical position measuring system including a scale that has at least two partial measuring graduations that have different graduation periods and a scanning unit that is movable relative to the scale along a measuring direction. The scanning unit includes a light source that emits light beams, a reflector element and a detector element, wherein the light beams emitted by the light source are deflected several times by the reflector element in the direction of the course of propagation of the emitted light beams and impinge several times on said scale before they impinge on said detector element, on which scanning signals, which are modulated as a function of displacement, are detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.