Capacitive differential pressure sensor with coupled diaphragms
US6431003B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2000 |
| Grant date | Aug 13, 2002 |
| Priority date | — |
| Expiry date | Dec 7, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L13/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor for measuring the differential pressure of a first and a second fluid. The sensor includes a housing having an internal opening, a first diaphragm disposed in the opening and exposed to the first fluid, and a second diaphragm disposed in the opening and exposed to the second fluid. The first diaphragm and the second diaphragm are each made of a conductive material and coupled together such that the differential pressure of the first and second fluids deflects the first and second diaphragms in the same direction. The deflection of the first and second diaphragms can be sensed to determine the differential pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.