Micro-mirror apparatus and production method therefor
US6431714B1 · kind B1 · utility
23Cited by
6References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2001 |
| Grant date | Aug 13, 2002 |
| Priority date | — |
| Expiry date | Oct 5, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/904
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The micro-mirror apparatus of the invention has; a mirror 33, a plurality of torsion springs 35, 36 for supporting the mirror 33 so as to be tiltable relative to an upper substrate 27, a lower substrate 21 arranged facing a lower face of the mirror 33, a convex portion 34 provided on an upper face of the lower substrate 21 and a plurality of lower electrodes 22, 23 formed on an outer face of the convex portion 34. For the torsion spring 36, an aspect ratio of height/width in a cross-section perpendicular to a longitudinal direction thereof is at least 1.8.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.