Spring electrical connectors for a megasonic cleaning system
US6431908B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2000 |
| Grant date | Aug 13, 2002 |
| Priority date | — |
| Expiry date | Sep 15, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG10K11/02
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A system for making electrical connections to a piezoelectric crystal in a megasonic transducer. The system comprises a printed circuit board, one or more first spring connectors and one or more second spring connectors. The printed circuit board has a first copper trace plated on it that is adapted for electrical connection to the active terminal of an RF generator. A second copper trace is plated on the printed circuit board and is adapted for electrical connection to the ground terminal of the RF generator. The first spring connectors are electrically connected to the first trace and are positioned to make electrical contact with the back side of the piezoelectric crystal. The second spring connectors are electrically connected to the second trace and are positioned to make electrical contact with the front side of the piezoelectric crystal, so that the piezoelectric crystal is exited when the RF generator is in operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.