Direct current high-pressure glow discharges
US6433480B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 27, 2000 |
| Grant date | Aug 13, 2002 |
| Priority date | — |
| Expiry date | May 27, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/481
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention improves the stability and control of high-pressure glow discharges by means of a microhllow cathode discharge. The microhollow cathode discharge, which is sustained between two closely spaced electrodes with an opening formed in the electrodes, serves as a plasma cathode for the high-pressure glow. Small variations in the microhollow cathode discharge voltage generate large variations in the microhollow cathode discharge current and consequently in the glow discharge current. In this mode of operation the electrical characteristic of this invention resembles that of a vacuum triode. Using the microhollow cathode discharge as a plasma cathode, stable, dc discharges in argon up to atmospheric pressures can be generated. Additionally, parallel operation of these discharges allows for the generation of large volume plasmas at high gas pressure through superposition of individual glow discharges. Thus, this invention allows simultaneous generation of relatively high electron densities at relatively low temperatures with stable, direct current, homogenous glow discharge plasma at relatively high pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.