Magnetic-field thermal treatment apparatus capable of reducing weight and utility consumption thereof
US6433661B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Sep 21, 2000 |
| Grant date | Aug 13, 2002 |
| Priority date | — |
| Expiry date | Sep 21, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S117/917
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A magnetic-field thermal treatment apparatus is used to carry out a thermal treatment for plural substrates, which are placed in a vacuum chamber, as a magnetic field is applied to the substrates. Around the vacuum chamber, a heater and a solenoid type cryocooler-cooled superconductive magnet unit as a magnetic field generating unit are provided. The substrates held in a substrate holder are retained in the interior of the vacuum chamber so that the surfaces of the substrates become parallel to one another in a vertical direction. The superconductive magnet unit has at least one superconductive coil surrounding the vacuum chamber horizontally so as to exert the magnetic field, which is parallel to the surfaces of the substrates, on the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.