Patent · US Expired

Light modulation device and system

US6433917B1 · kind B1 · utility

191Cited by
63References
42Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 22, 2000
Grant dateAug 13, 2002
Priority date
Expiry dateNov 22, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B6/3584
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the flexible member. The mirror is attached to the flexible member so that it can move therewith. The flexible member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the flexible member.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.