Friction vacuum pump with a stator and a rotor

US6435811B1 · kind B1 · utility

Assignee

• LEYBOLD VAKUUM GmbH · DE

Inventors

• Christian Beyer · Freiberg, DE
• Ralf Adamietz · Wermelskirchen, DE
• Markus Henry · Cologne, DE
• Gunter Schutz · Recklinghausen, DE
• Heinrich Engländer · Linnich, DE
• Gerhard Walter · Hamburg, DE
• Hans-Rudolf Fischer · Nidderau, DE

Key dates

• Filing date: Nov 8, 2000
• Grant date: Aug 20, 2002
• Expiry date: Nov 8, 2020

Classification

• Technology area (CPC F): Mechanical Engineering; Lighting; Heating
• CPC primary: F04D19/046
• WIPO field: Engines, pumps, turbines
• WIPO sector: Mechanical engineering

Abstract

The invention relates to a friction vacuum pump (1) with a stator (3) and a rotor (4), which form at least two pump stages (12, 13, 14) with one gas inlet (23, 28) each, as well as with junction for the pump stages, which are equipped with junction openings (36,37) and serve for the connection of the gas inlets (23, 28) of the pump stages with devices to be evacuated; in order to avoid high conductance losses it is proposed that the junction openings (36, 37) are located in a plane which is disposed laterally adjacent to the pump stages (12, 13, 14) such that the distance between the junction openings (36, 37) and the rotor axis (15) is of minimum feasible size.