Method and system for varying the transmission of an attenuated phase shift mask
US6436588B1 · kind B1 · utility
4Cited by
2References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2000 |
| Grant date | Aug 20, 2002 |
| Priority date | — |
| Expiry date | Feb 8, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/32
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system for varying the transmission of an attenuated phase shift mask (14) is provided that includes an attenuated phase shift mask (14), a transparent support (16) and a modulation system (18). The mask (14) comprises a variable transmission material. The transparent support (16) supports the mask (14). The modulation system (18) is operable to apply a variable force at the mask (14) to control the transmission of the mask (14).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.