Scanner system and piezoelectric micro-inching mechansim used in scanning probe microscope
US6437343B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 1999 |
| Grant date | Aug 20, 2002 |
| Priority date | — |
| Expiry date | Mar 9, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A tube scanner comprises a piezoelectric ceramic in the form of a hollow cylinder, which is externally surrounded by a Z-axis outside electrode and four slip-shaped driving electrodes arranged at intervals in the circumferential direction. The piezoelectric ceramic is internally surrounded by a Z-axis inside electrode and an XY-axis common electrode. The Z-axis inside electrode faces the Z-axis outside electrode across the piezoelectric ceramic, while the XY-axis common electrode faces the X- and Y-axis driving electrodes across the ceramic. Opposite-polarity voltages are applied to the Z-axis outside electrode and the Z-axis inside electrode, individually, whereupon the tube scanner is displaced in the Z-axis direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.