Multi-directional thermal actuator
US6438954B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 27, 2001 |
| Grant date | Aug 27, 2002 |
| Priority date | — |
| Expiry date | Apr 27, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2061/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micrometer sized multi-directional thermal actuator capable of repeatable and rapid displacement in a substantially horizontal direction, a substantially vertical direction, and/or a combination thereof. The multi-directional thermal actuator constructed on a surface of a substrate includes three or more beams each cantilevered from one or more anchors at a first end to extend generally parallel to the surface of the substrate. A member mechanically and electrically couples the distal ends of the beams. Application of current to a circuit comprising combinations of any two or more of the beams displaces the member in one of three or more non-parallel radial directions, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.