Multimirror stack for vertical integration of MEMS devices in two-position retroreflectors
US6439728B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 28, 2001 |
| Grant date | Aug 27, 2002 |
| Priority date | — |
| Expiry date | Aug 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A retroreflector is provided with a substrate over which a moveable micromirror is formed. The moveable micromirror is adapted to be tilted into at least two distinct positions. A multimirror stack is also positioned on the substrate. The multimirror stack includes multiple fixed structures bonded together. Each of the fixed structures has a reflective surface, and the multimirror stack is configured with respect to the moveable micromirror to provide retroreflection paths. An optical ray incident at a predetermined angle with respect to the substrate is subjected to retroreflection for at least two distinct positions of the moveable micromirror. Each retroreflection includes a reflection off the moveable micromirror and a reflection off one of the fixed structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.