Patent · US Expired

Tool and method for the abrasive machining of a substantially planar surface

US6439987B1 · kind B1 · utility

2Cited by

11References

7Claims

0Family size

Assignee

Wacker Siltronic Gesellschaft Fur Halbleitermaterialien AG · DE

Inventors

Bert Ripper · Postbauer-Heng, DE
Hubert Grubmüller · Mattighofen, AT

Key dates

Filing date	Jun 23, 2000
Grant date	Aug 27, 2002
Priority date	—
Expiry date	Sep 6, 2020

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB24D7/10
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A tool and method are provided for the abrasive machining of a substantially planar surface. The tool has a base body and a plurality of elements which are mounted on the base body and form a planar coating which is used as a working coating during machining of the surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.