Near field optical scanning system employing microfabricated solid immersion lens
US6441359B1 · kind B1 · utility
87Cited by
15References
43Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 7, 1999 |
| Grant date | Aug 27, 2002 |
| Priority date | — |
| Expiry date | Oct 7, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/862
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.