Method and apparatus for testing of sheet material
US6443002B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2001 |
| Grant date | Sep 3, 2002 |
| Priority date | — |
| Expiry date | Mar 20, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67778
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for testing of electrical, mechanical, physical and/or chemical properties of material in sheet form includes a cassette for holding of sheets and sensors rigidly mounted relative to the cassette. The sensors may be mounted adjacent a test location exterior to the cassette. The cassette and the sensors may be so configured and positioned that a suitable end effector may move sheets of material between storage locations in the cassette and test locations adjacent the sensors. A method for testing sheet material includes the steps of placing the sheet material in a cassette, and conducting tests employing one or more sensors rigidly mounted with respect to the cassette. The method may include employing an end effector to remove the sheet from the cassette, to position the sheet stepwise in several positions relative to the sensors, and to replace the sheet in the cassette upon completion of testing. Materials to be tested include flat panels for computer screens and other applications and semiconductor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.