Method to make gas permeable shell for MEMS devices with controlled porosity
US6444135B1 · kind B1 · utility
2Cited by
16References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2000 |
| Grant date | Sep 3, 2002 |
| Priority date | — |
| Expiry date | Mar 15, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/025
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method and system for making a gas permeable shell in a micro electromechanical systems (MEMS) device is disclosed. The MEMS device is created with an internal sacrificial layer. The device is then coated with a slurry composition which, after drying, is later exposed to a solvent. As a result, the sacrificial layer is removed to produce interconnected voids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.