Method for producing a titanium monophosphide layer and its use

US6444265B1 · kind B1 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Barbara Fröschle · Blaustein, DE
• Roland Leutenecker · Wiedenzhausen, DE
• Peter Ramm · St. Catharines, CA

Key dates

• Filing date: May 28, 1999
• Grant date: Sep 3, 2002
• Expiry date: May 28, 2019

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/56
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

In a method for producing a titanium monophosphide layer, a carrier is first placed in a reactor. Thereafter, a TiN layer is deposited on the carrier by supplying TiCl4 ad NH3 into the reactor. The TiN layer is annealed immediately after deposition of the TiN layer while PH3 is supplied to the reactor, in order to form the titanium monophosphide layer on the TiN layer.