Flexible silicon strain gage
US6444487B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 5, 1999 |
| Grant date | Sep 3, 2002 |
| Priority date | — |
| Expiry date | Feb 5, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0055
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A generally flexible strain gage comprising a strain sensing element, and a generally flexible substrate supporting the strain sensing element. The strain sensing element is made of single crystal or polycrystalline semiconducting material. The invention also includes a method for forming a generally flexible strain gage comprising the step of selecting a wafer having a portion of a base material and portion of a single crystal or polycrystalline semiconducting material located thereon. The method further comprises the steps of etching a strain sensing element out of the semiconducting material and forming a generally flexible substrate onto said sensing element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.