Patent · US Expired

Dissolution stage for an environmental scanning electron microscope

US6444982B1 · kind B1 · utility

5Cited by
3References
30Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 22, 2000
Grant dateSep 3, 2002
Priority date
Expiry dateJun 22, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2605
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A system is provided for imaging, in an ESE microscope or other variable pressure microscope, a single sample at various time intervals during dissolution of the sample in a liquid. The system includes a sample chamber having a sample well. The sample well includes an first fluid port and a second fluid port for forming a dissolution bath in the sample well. In accordance with the system according to the present invention, the sample chamber is placed into the specimen chamber of the ESE microscope and a sample is deposited into the sample well of the sample chamber. The sample is immersed in a liquid which flows through the sample well via the first and second fluid ports during a dissolution cycle. The liquid is then drained from the sample well via one of the first and second fluid ports during a draining cycle, and then, during an imaging cycle, the sample is imaged by the ESE microscope. The dissolution cycle, the draining cycle, and the imaging cycle all occur while the sample well is inside the specimen chamber of the ESE microscope.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.