Device with acoustic waves guided in a fine piezoelectric material film bonded with a molecular bonding on a bearing substrate and method for making same
US6445265B1 · kind B1 · utility
75Cited by
6References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 30, 2000 |
| Grant date | Sep 3, 2002 |
| Priority date | — |
| Expiry date | Aug 30, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A surface acoustic wave device including a thin layer of piezoelectric material, a layer of molecular bonder, and a carrier substrate. The thin layer constitutes an acoustic energy guide that augments the performance characteristics of the device. A method for making the acoustic wave device includes a step of molecular bonding between a carrier substrate and a piezoelectric substrate, and then a step for reducing the thickness of the piezoelectric substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.