Multi-chamber vacuum system and a method of operating the same
US6446651B1 · kind B1 · utility
13Cited by
13References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 27, 2000 |
| Grant date | Sep 10, 2002 |
| Priority date | — |
| Expiry date | Jun 27, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86131
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum system including first and second vacuum chambers, a high-vacuum pump having its inlet connected with the first vacuum chamber, a dischargeable into atmosphere, vacuum pump for evacuating both first and second vacuum chambers; a first valve for connecting an inlet of the dischargeable in atmosphere, vacuum pump with an outlet of the high-vacuum pump, and a second valve for connecting the inlet of the dischargeable in atmosphere, vacuum pump with the second vacuum chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.