Method for producing a single-crystalline film of KLN or KLNT
US6447606B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 26, 1999 |
| Grant date | Sep 10, 2002 |
| Priority date | — |
| Expiry date | May 26, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S117/918
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for producing a single-crystalline film made of a single crystal of lithium potassium niobate-lithium potassium tantalate solid solution or a single crystal of lithium potassium niobate, including the steps of preparing a target made of a material for the single-crystalline film, preparing a foundation made of a single crystal of lithium potassium niobate-lithium potassium tantalate solid solution or a single crystal of lithium potassium niobate, irradiating the target to gasify molecules constituting the target by dissociation and evaporation thereof, and epitaxially growing the single-crystalline film on the foundation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.