Electric heating element
US6448538B1 · kind B1 · utility
Inventor
Key dates
| Filing date | May 17, 1999 |
| Grant date | Sep 10, 2002 |
| Priority date | — |
| Expiry date | May 17, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49082
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electric heating element formed on an insulating ceramic substance includes and electrically heat-generating material film having a microstructure composed of a silicide alone, a mixture of silicide and Si, or Si along fused to the surface of sintered nitride or carbide ceramic insulating substrate. A heating mechanism is coupled with the bottom face of an electrostatically chucking mechanism provided with a dielectric ceramic and electrodes formed on the bottom face of face of the heating mechanism. The heating mechanism has a fusable electric-heating material film between two ceramic insulting substrates having the same or nearly the same coefficients of thermal expansion. The films is fused to the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.