Piezoelectric/electrostrictive film type device
US6448623B2 · kind B2 · utility
3Cited by
4References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 2001 |
| Grant date | Sep 10, 2002 |
| Priority date | — |
| Expiry date | May 7, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2047
Abstract
A lower electrode 4 of a substrate 1 is continuously formed from a thin diaphragm portion 3 to a thick region 2, and independently of the lower electrode 4, an auxiliary electrode 8 is formed on the thick region 2 of the substrate 1, whereby a piezoelectric/electrostrictive film 5 is formed across the lower electrode 4 and the auxiliary electrode 8. An incomplete bonding portion of the piezoelectric/electrostrictive film 5 to the substrate 1 is eliminated on the thin diaphragm portion 3, thereby making it possible to reduce significantly a variation in vibration form.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.