Deflectable micro-mirror
US6449079B1 · kind B1 · utility
32Cited by
7References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 20, 2000 |
| Grant date | Sep 10, 2002 |
| Priority date | — |
| Expiry date | Nov 20, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0858
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An oscillatory micromirror having a cantilevered mirror surface is joined using at least one torsion axis formed by at least one torsion beam mounted on the mirror surface, to a support member that surrounds at least portions of the mirror surface. There is located between at least one of the torsion beams and the support member a flexural beam that performs a flexural oscillation which induces a torsional oscillation of the mirror surface about the torsion axis. At a suitable frequency, large amplitudes of the torsional oscillation may be provided by small amplitudes of the flexural oscillation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.