Micromachined optomechanical switching devices
US6449406B1 · kind B1 · utility
54Cited by
81References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2000 |
| Grant date | Sep 10, 2002 |
| Priority date | — |
| Expiry date | Jan 13, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04Q2011/0049
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Various configurations of micromachined optomechanical switching cells are disclosed herein. In accordance with the invention, an optomechanical switching cell is provided which includes an actuator positioned on a substrate and a mirror coupled to the actuator. The switching cell also includes an electrode disposed upon the substrate under the actuator. An insulator may also be interposed between the substrate and the electrode. In another aspect of the present invention the switching cell includes a latch having a first end region connected to the substrate and a second end region engaged by the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.