Two-dimensional tunable filter array for a matrix of integrated fiber optic input-output light channels
US6449410B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 16, 2001 |
| Grant date | Sep 10, 2002 |
| Priority date | — |
| Expiry date | Mar 16, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4214
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An integrated two-dimensional tunable filter array for a matrix of fiber-optic input-output light channels includes a tunable filter chip array sandwiched between a first semiconductive wafer in which the guiding grooves for the input light channels terminate in a 45° reflecting surface causing a 90° turn of the light beams into each tunable filter of the array. Then a third semiconductive substrate is bonded to the other side of the tunable filter array to receive the reflected light beams. A 45° mirror on a {111} plane may be formed by slow etching of a {100} type wafer or the use of a {100} type wafer with a 9.7° off axis cut.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.