Method and apparatus for measuring and adjusting resonance frequency of resonators
US6450034B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 2000 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Oct 18, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2824
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A filter has a plurality of resonators formed regularly on a substrate and made of a superconducting material. In measuring resonance frequency of the resonators, the filter and a conductive metal plate having an opening are placed in a vacuum chamber so that all the resonators other than one resonator which faces the opening are covered with the metal plate. The metal plate has an input probe and an output probe at the opening of the metal plate. The resonance frequency of each resonator is measured in sequence while rotating the metal plate. Each resonator is adjusted in shape by a laser trimming or providing a dielectric film in correspondence with the measured resonance frequency so that all the resonators have a fixed resonance frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.