Method of making a PVD Al2O3 coated cutting tool

US6451180B1 · kind B1 · utility

Assignee

• SANDVIK AB · SE

Inventors

• Siegfried Schiller · Dresden, DE
• Klaus Goedicke · Dresden, DE
• Fred Fietzke · Dresden, DE
• Olaf Zywitzki · Freiberg, DE
• Mats Sjostrand · Sollentuna, SE
• Bjorn Ljungberg · Stuvsta-Snättringe, SE

Key dates

• Filing date: May 2, 2000
• Grant date: Sep 17, 2002
• Expiry date: May 2, 2020

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C30/005
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The present invention relates to a process for producing a coated cutting tool consisting of a coating and a substrate, wherein at least one refractory layer consisting of fine-grained, crystalline &ggr;-Al2O3 is deposited by reactive magnetron sputtering onto the moving substrate in a vacuum by pulsed magnetron sputtering in a mixture of a rare gas and a reactive gas at a pulse frequency set for 10 to 100 kHz. The deposition occurs with a rate of at least 1 nm/s with reference to a stationarily arranged substrate at a magnetron target power density in time average set for at least 10 W/cm2. The substrate temperature is in the range 400 to 700° C. and the flux of impinging particles onto each individual substrate is cyclically interrupted.