Atmospheric electron x-ray spectrometer
US6452177B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 3, 1999 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Sep 3, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention comprises an apparatus for performing in-situ elemental analyses of surfaces. The invention comprises an atmospheric electron x-ray spectrometer with an electron column which generates, accelerates, and focuses electrons in a column which is isolated from ambient pressure by a:thin, electron transparent membrane. After passing through the membrane, the electrons impinge on the sample in atmosphere to generate characteristic x-rays. An x-ray detector, shaping amplifier, and multi-channel analyzer are used for x-ray detection and signal analysis. By comparing the resultant data to known x-ray spectral signatures, the elemental composition of the surface can be determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.