Optical translation measurement
US6452683B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 8, 1999 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Mar 8, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2203/0338
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for determining the relative motion of a surface with respect to a measurement device, comprising:illuminating the surface with incident illumination, having a coherence length, such that the illumination is reflected from portions of the surface, wherein at least part of at least one of the incident and reflected illumination passes through a partially transmitting object that is part of the measuring device;detecting the illumination reflected from the surface, to generate a detected signal; anddetermining the relative motion of the surface parallel to the surface, from the detected signal,wherein the object and the surface are situated within a distance that is less than the coherence length of the detected illumination.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.