Micromachined optomechanical switching cell with parallel plate actuator and on-chip power monitoring
US6453083B1 · kind B1 · utility
Inventors
Key dates
| Filing date | Jan 13, 2000 |
| Grant date | Sep 17, 2002 |
| Priority date | — |
| Expiry date | Jan 13, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04Q2011/0049
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A number of micromachined optomechanical switching cells and matrix switches including such switching cells are disclosed herein. One optomechanical switching cell of the present invention includes a parallel plate actuator positioned on a substrate. A mirror coupled to the actuator is disposed to selectively redirect an incident optical beam. The present invention also contemplates an optomechanical matrix switch including a substrate and a plurality of optomechanical switching cells coupled thereto. The matrix switch further includes an arrangement for monitoring the optical power incident upon, and output by, the matrix switch.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.