System and method for calibrating semiconductor processing equipment
US6453742B1 · kind B1 · utility
3Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2000 |
| Grant date | Sep 24, 2002 |
| Priority date | — |
| Expiry date | Nov 3, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system for measuring the rotational speed of a shaft driven by a motor. The system includes a rotation measurement device having a rotatable sensor and configured to generate a signal corresponding to rotation of the sensor. The rotation measurement device may be supported by a fixture mountable on the motor. A coupler is associated with the sensor and includes a gripping surface configured to contact and grip the end-surface of the shaft to couple the sensor to the shaft and impart the rotation of the shaft to the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.