Vacuum pump and vacuum apparatus
US6454524B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 1999 |
| Grant date | Sep 24, 2002 |
| Priority date | — |
| Expiry date | Jul 16, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D27/00
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pump and a vacuum apparatus are provided in which gas suction and discharge force can be adjusted without producing dust. The vacuum apparatus includes a vacuum pump 1 for sucking and discharging gas within a chamber 90. The vacuum pump 1 is provided with a communicating pipe 85 that pierces the casing for communicating between the outside of the apparatus and the rotor blades and the stator blades of the turbomolecular pump section. An inert gas is supplied to the turbomolecular pump section through the communicating pipe 85 so that the inert gas is mixed with the gas that has sucked from the chamber 90. The communicating pipe 85 includes a valve 86, and an open/close operation of the valve 86 is controlled in accordance with an output from a pressure sensor 97 witnin the chamber 90. An amount of the inert to be supplied to the turbomolecular pump section T and then mixed, is adjusted by the valve 86 so that a pressure within the vacuum pump 1 is adjusted, with the result that a gas suction force from the chamber 90 can be adjusted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.