Patent · US Expired

Turbomolecular pump

US6454525B2 · kind B2 · utility

3Cited by

5References

4Claims

0Family size

Assignee

PFEIFFER VACUUM · FR

Inventors

Armin Blecker · Aßlar, DE
Wolfgang Bremer · Ettlingen, DE
Peter Fahrenbach · Solms, DE

Key dates

Filing date	Feb 23, 2001
Grant date	Sep 24, 2002
Priority date	—
Expiry date	Feb 23, 2021

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04D19/042
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A turbomolecular pump including a plurality of rotor and stator discs alternatingly arranged with each other, a plurality of spacer rings for spacing the stator discs from each other, and at least one elastically deformable metallic member arranged between at least two spacer rings, with the stator discs, the spacer rings, and the elastically deformable metallic member forming together a stator stack.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.