Method and apparatus for determining the pass through flux of magnetic materials
US6454911B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2000 |
| Grant date | Sep 24, 2002 |
| Priority date | — |
| Expiry date | Sep 26, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the x, y, z directions. The apparatus also comprises a magnet field source or arrangement of magnet field sources which are placed beneath the material being characterized and includes a mechanism whereby the magnetic material can be mapped by the movement of any one or combination of: magnetic field source or sources, sensors and magnetic material. The invented method comprises the use of various configurations of magnetic sources in order to generate a magnetic field that emulates the open-loop condition found in magnetron sputtering.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.