Patent · US Expired

Method and apparatus for determining the pass through flux of magnetic materials

US6454911B1 · kind B1 · utility

6Cited by
5References
44Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 3, 2000
Grant dateSep 24, 2002
Priority date
Expiry dateSep 26, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R33/10
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The invention includes an apparatus and method for determining the pass through flux of magnetic materials. The apparatus comprises one or more magnetic field sensors arranged in such a way as to collect field strength data in any or all the x, y, z directions. The apparatus also comprises a magnet field source or arrangement of magnet field sources which are placed beneath the material being characterized and includes a mechanism whereby the magnetic material can be mapped by the movement of any one or combination of: magnetic field source or sources, sensors and magnetic material. The invented method comprises the use of various configurations of magnetic sources in order to generate a magnetic field that emulates the open-loop condition found in magnetron sputtering.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.