Moiré interferometer with overlapping illumination and imaging systems
US6456384B1 · kind B1 · utility
3Cited by
6References
42Claims
0Family size
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Key dates
| Filing date | Nov 9, 2000 |
| Grant date | Sep 24, 2002 |
| Priority date | — |
| Expiry date | Nov 9, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/254
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A moiré interferometer has an illumination system and an imaging system that share a common focusing optic, which preferably takes the form of a concave mirror. Within the illumination system, the common focusing optic collimates light en route to a test surface. Within the imaging system, the common focusing optic telecentrically images a grating pattern appearing on the test surface onto a fringe pattern detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.