Glow discharge detector
US6457347B1 · kind B1 · utility
13Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 15, 1999 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | Dec 15, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2030/642
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A highly sensitive electronic ion cell for the measurement of trace elements in He carrier gas which involves glow discharge. A constant wave (CW) glow discharge detector which is controlled through a biased resistor, can detect the change of electron density caused by impurities in the He carrier gas by many orders of magnitude larger than that caused by direct ionization or electron capture. The glow discharge detector utilizes a floating pseudo-electrode to form a probe in or near the plasma. By using this probe, the large variation of electron density due to trace amounts of impurities can be directly measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.