Process for purifying perfluorinated products
US6458249B2 · kind B2 · utility
5Cited by
9References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1998 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | Nov 9, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2006/80
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Nitrogen trifluoride (NF3) containing less than 10 parts-per-million molar impurities, e.g., tetrafluoromethane (PFC-14), is disclosed. Azeotropic and extractive distillation processes using entraining agents for separating NF3 and PFC-14 from each other and from mixtures with other electronics industry materials are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.