Installation in which an operation is performed requiring over the atmosphere inside a chamber
US6458330B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 18, 2000 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | Dec 18, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0676
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Optimization of an installation in which an operation is performed that requires control over the atmosphere inside a chamber (3), the operation being performed in the presence of a gaseous mixture capable of giving off emissions, the optimization being obtained by the presence of inlet (5) and outlet (8) devices external to the chamber to oppose the ingress of air into the chamber and the exit of gaseous emissions; and of an extraction device (4) comprising means (42) for regulating the flow rate to maintain an approximately zero pressure differential between the inside and the outside of the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.