Resist compositions
US6458509B1 · kind B1 · utility
14Cited by
5References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 1, 2000 |
| Grant date | Oct 1, 2002 |
| Priority date | — |
| Expiry date | May 1, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/155
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A resist composition comprising: a curable composition mainly comprising (1) at least one of an alkali-soluble acrylic compound and an alkali-soluble methacrylic compound; (2) a fine-particulate crosslinked elastic polymer having a carboxyl group; and (3) an agent for enhancing adhesion with respect to copper.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.